Diaphragm for use with hydrogen-containing fluid media and transducer comprising such a diaphragm
AssigneeKistler Holding AG
InventorsGiovanni Mastrogiacomo, Hans Beat Maerki, Thomas Cadonau
Life of this patent
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Abstract
A diaphragm for hermetically separating a first space accommodating a hydrogen-containing fluid medium from a second space. The diaphragm includes a metallic material and a coating that has properties effecting a reduction of the permeability for molecular and/or atomic hydrogen. The coating is arranged between the metallic material of the diaphragm and the fluid medium at least in an area that shields the metallic material from coming into contact with the fluid medium when the diaphragm is in use. The coating includes at least one non-stoichiometric oxide, carbide or nitride.
Claims21
A diaphragm for hermetically separating a first space from a second space that is configured to contain a fluid medium, which includes hydrogen, the diaphragm comprising:
- a metallic material disposed to face towards the second space;
- a coating disposed between the metallic material and the second space, wherein the coating is configured for reducing the permeability for molecular and/or atomic hydrogen;
- wherein the coating includes at least one non-stoichiometric oxide, carbide or nitride comprising aluminum oxide, aluminum carbide, aluminum nitride, chromium oxide, chromium nitride, silicon oxide, silicon carbide, silicon nitride, titanium oxide, titanium carbide, titanium nitride, zirconium oxide or rare earth oxides.
The diaphragm according to claim 18, wherein the adhesion promoter layer has a purity of at least 75% by weight;
- or wherein the adhesion promoter layer comprises at least 90% by weight of zirconium or tungsten.
A transducer (1) for measuring a pressure of a hydrogen-containing fluid medium disposed within a space, the transducer comprising:
- a pressure-exposed end that is disposable to face the fluid medium that is to be measured when the transducer is in use;
- a housing;
- a measuring arrangement disposed in the housing and including a sensor configured to generate a signal proportionate to a pressure detected by the sensor;
- and
- a diaphragm that includes:
- a metallic material,
- a coating disposed between the metallic material and the space in which the fluid medium is disposed, wherein the coating is configured for reducing the permeability for molecular and/or atomic hydrogen,
- wherein the coating includes at least one non-stoichiometric oxide, carbide or nitride comprising aluminum oxide, aluminum carbide, aluminum nitride, chromium oxide, chromium nitride, silicon oxide, silicon carbide, silicon nitride, titanium oxide, titanium carbide, titanium nitride, zirconium oxide or rare earth oxides.
Dependencies are inferred from the claim text.