Gyroscope Drive Loop with Resonant Amplitude Sampling and PWM Drive

A microelectromechanical system (MEMS) gyroscope, comprising:

• a suspended spring-mass system comprising a driven mass;
• a drive system operably coupled to the driven mass via the suspended spring-mass system to impart a drive motion onto the driven mass based on a drive signal;
• one or more drive sense electrodes located proximate to the driven mass to generate a drive sense signal based on the drive motion of the driven mass;
• and
• processing circuitry configured to receive the drive sense signal, digitize the drive sense signal, digitally process the digitized drive sense signal with a high-pass filter, and utilize a zero-crossing detector and a programmable delay to generate a square wave drive signal with a programmable phase respect to the drive sense signal.

A method for driving a microelectromechanical system (MEMS) gyroscope, comprising:

• generating, by one or more drive sense electrodes located proximate to a driven mass of a suspended spring-mass system, a drive sense signal based on a drive motion of the driven mass;
• rectifying the drive sense signal;
• subtracting the rectified drive sense signal from a drive reference signal to generate an analog error signal;
• digitizing the analog error signal to generate a digitized error signal;
• digitally filtering the digitized error signal;
• generating a pulse-width-modulated drive control signal based on the digitally filtered digitized error signal;
• generating a drive signal in proportion to the pulse-width-modulated drive control signal;
• and
• imparting, by a drive system operably coupled to the driven mass via the suspended spring-mass system, a drive motion onto the driven mass based on the drive signal.