Multi-zone coatings on parts for galling prevention and high-temperature chemical stability
AssigneeLam Research Corporation
InventorsRohit Ode, Troy Alan Gomm
Life of this patent
Estimating the term…
Abstract
Disclosed herein are fasteners for use in a semiconductor wafer process chamber. The fasteners may be used to secure hardware. The fasteners may include outermost surfaces that are provided by multiple different coatings, e.g., a hard coating and a dry lubricant coating. The hard coating may provide outermost surfaces of the fastener that are exposed to a plasma when a remote plasma clean is performed and may be used to prevent particle generation when the fastener is subjected to the remote plasma clean. The dry lubricant coating may provide outermost surfaces of a threaded portion of the fastener and may be used to prevent galling.
Claims20
A fastener comprising:
- a head;
- and
- a shank connected to a first side of the head, wherein:
- a first portion of the shank is threaded;
- a first zone extends from a second side of the head to at least the first side of the head;
- a second zone covers at least a portion of the first portion;
- an outermost surface of the fastener in the first zone is provided by a hard coating;
- and
- an outermost surface of the fastener in the second zone is provided by a dry lubricant coating.
An apparatus comprising:
- a spindle having an indexer hub with a plurality of indexer arms extending therefrom and a plurality of fasteners with exposed heads supported by the indexer hub, wherein:
- each fastener of the plurality of fasteners has a shank connected to a first side of a head;
- a first portion of the shank is threaded;
- a first zone extends from a second side of the head to at least the first side of the head;
- a second zone covers at least a portion of the first portion;
- an outermost surface of the fastener in the first zone is provided by a hard coating;
- and
- an outermost surface of the fastener in the second zone is provided by a dry lubricant coating.
Dependencies are inferred from the claim text.