Vapor deposition systems and methods, and nanomaterials formed by vapor deposition
AssigneeUniversity of Maryland, College Park
InventorsLiangbing HU, Xizheng WANG
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AssigneeUniversity of Maryland, College Park
InventorsLiangbing HU, Xizheng WANG
Estimating the term…
A vapor deposition system can have a support member, a baffle member, and a deposition substrate. The support member can hold a batch of solid-state precursors. The baffle member can be disposed over and spaced from the support member to define a confined heating volume with at least one exit window. The deposition substrate can be disposed over and spaced from the baffle member. The batch of solid-state precursors can be subjected to a temperature greater than 2200, so as to convert at least some of the solid-state precursors into a vapor that exits the confined heating volume via the at least one exit window, flows around the baffle member, and solidifies on the deposition substrate surface. In some embodiments, the baffle member can comprise a heating element. Alternatively or additionally, the vapor deposition system can have a separate heating system.
A method comprising:
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A system comprising:
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A system comprising:
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Dependencies are inferred from the claim text.