Novel 2-in-1 (uv-assisted and plasma enhanced) ald & ale chamber design

A UV-assisted and plasma-enhanced process method comprising:

• providing a lower chamber;
• wherein the lower chamber includes a reaction space, and a top of the lower chamber is provided with a chamber opening;
• providing an upper cover;
• wherein the upper cover includes an upper surface and a lower surface, the upper cover has a window and a plurality of vent holes communicating the upper surface and the lower surface, and the vent holes are arranged to surround the window;
• sealing the chamber opening with the upper cover with the lower surface facing the reaction space to form a reaction chamber;
• providing an outer tube body and an inner tube body disposed in the outer tube body, a bottom end of the outer tube body covering the window and the vent holes, and a bottom end of the inner tube body connected to the window;
• wherein a first gas chamber is formed inside the inner tube body and the first gas chamber is connected to the window;
• and a second gas chamber is formed between the outer tube body and the inner tube body, and the second gas chamber is connected to the vent holes;
• providing a UV light source at a top end of the inner tube body for emitting an ultraviolet light into the first gas chamber;
• providing an induction coil around the outer tube body for inductively generating an electric field by providing a time-varying magnetic flux to the outer tube body;
• inducing a first gas to the first gas chamber and inducing a second gas to the second gas chamber;
• and
• and activating the UV light source and the induction coil optionally.