Chamber component for improved cleaning efficiency
AssigneeApplied Materials, Inc.
InventorsShinichi OKI, Yoshinobu MORI, Yuji AOKI
Life of this patent
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Abstract
A pre-heat ring and a process chamber having the same are described herein. In one example, a process chamber for film deposition comprises a chamber volume, a substrate support disposed in the chamber volume, the substrate support having a radially outward surface, and a pre-heat ring surrounding the substrate support. The pre-heat ring comprises a tapered wall facing the radially outward surface. The tapered wall narrows towards a top surface of the pre-heat ring and towards the substrate support.
Claims20
A process chamber for film deposition comprising:
- a process chamber having a chamber volume;
- a substrate support disposed in the chamber volume, the substrate support having a radially outward surface;
- and
- a pre-heat ring surrounding the substrate support, the pre-heat ring comprising:
- a tapered wall facing the radially outward surface, the tapered wall narrows towards a top surface of the pre-heat ring and towards the substrate support.
A pre-heat ring for a substrate processing chamber, the pre-heat ring comprising:
- an annular body of the pre-heat ring, the annular body comprising:
- a top surface;
- an outer bottom surface disposed parallel to the top surface;
- an outer wall extending between the top surface and the outer bottom surface;
- an inner wall, the inner wall disposed substantially parallel to the outer wall and extending from the outer bottom surface toward the top surface, at least a portion of the top surface extends radially inward of the inner wall;
- an inner bottom surface, the inner bottom surface disposed substantially parallel to the outer bottom surface and extending radially inward from the inner wall;
- and
- a tapered wall, the tapered wall extending between to the top surface and the inner bottom surface, the tapered wall at an angle greater than 0 degrees and less than 90 degrees relative to inner bottom surface, the tapered wall having a length of about 1 millimeter (mm) to about 30 mm.
Dependencies are inferred from the claim text.