Deposition module and display device manufacturing apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsHwapyeong Jeong, Mingyu Seo, Sangmin Jung, Ganyoung Park, Jonggun Yun, Kyoungwoon Lee
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AssigneeSamsung Display Co., Ltd.
InventorsHwapyeong Jeong, Mingyu Seo, Sangmin Jung, Ganyoung Park, Jonggun Yun, Kyoungwoon Lee
Estimating the term…
A display device manufacturing apparatus includes a mask assembly, and a deposition module configured to supply a deposition material toward the mask assembly. The deposition module includes a deposition frame, a spraying portion, a heater, and a close contact portion. The deposition frame has an internal space. The spraying portion includes a crucible portion and a nozzle portion. The heater heats the nozzle portion and is configured to be switchable between a first state and a second state with a higher heating value than the first state. The close contact portion brings the crucible portion and the nozzle portion into close contact with each other, and the close contact portion includes a pressing surface spaced apart from the spraying portion in the first state and configured to press on the spraying portion in the second state.
A display device manufacturing apparatus comprising:
A deposition module comprising:
Dependencies are inferred from the claim text.