Yttrium fluoride sprayed coating, spray material therefor, and corrosion resistant coating including sprayed coating
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNoriaki Hamaya, Yasushi Takai
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Abstract
The corrosion resistant coating has a multilayer structure comprising a lower layer in the form of a rare earth oxide sprayed coating having a thickness of 10 to 500 μm and a porosity of up to 5% and an outermost surface layer in the form of an yttrium fluoride sprayed coating.
Claims19
A corrosion resistant coating having a multilayer structure comprising a lower layer in the form of a rare earth oxide sprayed coating having a thickness of 10 to 500 μm and a porosity of up to 5% and an outermost surface layer in the form of an yttrium fluoride sprayed coating.
An yttrium fluoride spray material for forming an yttrium fluoride sprayed coating, which is a powder mixture consisting essentially of 95 to 85% by weight of a granulated powder of yttrium fluoride and 5 to 15% by weight of a granulated powder of yttrium oxide.
An yttrium fluoride spray material for forming the yttrium fluoride sprayed coating, in the form of a granulated powder consisting essentially of 9 to 27% by weight of Y5O4F7 and the balance of YF3.
Dependencies are inferred from the claim text.