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US 2025/0051695 A1Published application
Fluorinated cleaning fluid mixtures
Assignee3M Innovative Properties Company
InventorsTamami Kimura, Liping Claryn Ng, Nobuaki Ando
Life of this patent
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Abstract
Cleaning fluids include at least two fluid components. The first fluid component is a hydrofluorothioether or a chlorinated hydrofluoroolefin, or at least one of the isomers of a hydrochlorofluoroolefin, and the second fluid component is an alcohol with 1-5 carbon atoms. The cleaning fluid provides enhanced removal of particulate contamination, improved reduction of particle reattachment, or a combination thereof when compared to a cleaning fluid comprising a fluorinated fluid.
Claims17
A cleaning fluid comprising:
- a first fluid component comprising a hydrofluorothioether of Structure 1:
- R1—S—Rf1 Structure 1
- wherein R1 is a nonfluorinated alkyl group with 1-3 carbon atoms;
- Rf1 is a fluorinated or perfluorinated group containing 2-6 carbon atoms and optionally comprises one or more catenated heteroatoms;
- or a chlorinated hydrofluoroolefin of Structure 2
- cis-(CF3)HC═CHCl;
- Structure 2;
- or
- at least one of the two isomers of hydrochlorofluoroolefin of Structure 3,
- HClC=CF(CF2H) Structure 3
- at least one of the two isomers of hydrochlorofluoroolefin of Structure 4,
- FClC═CH(CF2H) Structure 4
- or a mixture thereof, and
- a second fluid component comprising at least one alcohol comprising structure 5:
- R2—OH Structure 5
- wherein R2 is an alkyl group with 1-5 carbon atoms,
- wherein the cleaning fluid provides enhanced removal of particulate contamination, improved reduction of particle reattachment, or a combination thereof when compared to a cleaning fluid comprising a fluorinated fluid.
14 more elements
A method of cleaning an article comprising:
- providing an article to be cleaned comprising at least one surface that comprises at least one contaminant;
- providing a cleaning fluid comprising:
- a first fluid component comprising a hydrofluorothioether of Structure 1:
- R1—S—Rf1 Structure 1
- wherein R1 is a nonfluorinated alkyl group with 1-3 carbon atoms;
- Rf1 is a fluorinated or perfluorinated group containing 2-6 carbon atoms and optionally comprises one or more catenated heteroatoms;
- or a chlorinated hydrofluoroolefin of Structure 2
- cis-(CF3)HC═CHCl;
- Structure 2;
- or
- at least one of the two isomers of hydrochlorofluoroolefin of Structure 3,
- HClC=CF(CF2H) Structure 3
- at least one of the two isomers of hydrochlorofluoroolefin of Structure 4,
- FClC═CH(CF2H) Structure 4
- or a mixture thereof, and
- a second fluid component comprising at least one alcohol comprising structure 5:
- R2—OH Structure 5
- wherein R2 is an alkyl group with 1-5 carbon atoms;
- and
- contacting the substrate surface with the cleaning fluid.
17 more elements
Dependencies are inferred from the claim text.