Resist composition and resist pattern formation method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMinoru Adegawa, Tsuyoshi Nakamura, Daichi Takaki, Hiromitsu Tsuji, Kumi Nakamura
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMinoru Adegawa, Tsuyoshi Nakamura, Daichi Takaki, Hiromitsu Tsuji, Kumi Nakamura
Estimating the term…
A resist composition containing a resin component that exhibits changed solubility in a developing solution under action of an acid, a photodecomposable base, and a fluorine additive component. The fluorine additive component includes a polymeric compound having a constitutional unit represented by General Formula (f01-1) and a constitutional unit represented by General Formula (f02-1). In the formulas, R represents a hydrogen atom; Vf01 represents an alkylene group or a halogenated alkylene group; Yf01 represents —CO—O— or —O—CO—; Rf01 represents an organic group containing a fluorine atom; Vf02 represents a divalent hydrocarbon group; Rf02 represents an acid dissociable group represented by General Formula (f02-r1-1); Rf021, Rf022, Rf023, Rf024, and Rf025 represent a hydrocarbon group; and Yf02 represents a quaternary carbon atom
A resist composition that generates an acid upon exposure and exhibits changed solubility in a developing solution under action of the acid, the resist composition comprising:
Dependencies are inferred from the claim text.