US 2025/0051373 A1Published application

New inorganic silyl and polysilyl derivatives of group v elements and methods of synthesizing the same and methods of using the same for deposition

AssigneeL'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude

InventorsFeng LI, Jean-Marc GIRARD, Peng ZHANG

Life of this patent

Estimating the term…

Loading patent…

Abstract

Disclosed are Group V element-containing precursors and methods of synthesizing the same and using the same on film depositions. The precursors are (SiR3)3−mA(SiaH2a+1)m, (SiR3)3−n−pA(SiaH2a+1)n(SibH2b+1)p or A(SiaH2a+1)(SibH2b+1)(SicH2c+1) wherein a=1 to 6; b=1 to 6; c=1 to 6; a/b/c; m=1 to 3; n=1 to 2, p=1 to 2, n+p=2 to 3; A=As, P, Sb, Bi; and R is selected from a C1 to C10, linear, branched or cyclic alkyl, alkenyl, alkynyl group. The synthesis methods include one-step, two-step or three-step reaction(s) between halo(poly)silane(s) and a tris(trialkylsilyl) derivative of A or a one-pot mixing reaction between a mixture of two or three halo(poly)silanes and the tris(trialkylsilyl) derivative of A. The deposition methods include CVD, PECVD, ALD, PEALD, flowable CVD, HW-CVD, Epitaxy, or the like.

Claims15

Dependent claims

A method for synthesizing a Group V element-containing compound, the method comprising:

contacting A(SiR3)3 with one, two or three types of halo(poly)silane(s) either in series or in a mixture, wherein the halo(poly)silane is selected from the group consisting of X—SiaH2a+1, X—SibH2b+1 and X—SicH2c+1;
and
dehalosilylating A(SiR3)3 to form the Group V element-containing compound
(SiR3)3−mA(SiaH2a+1)m,
(SiR3)3−n−pA(SiaH2a+1)n(SibH2b+1)p or
A(SiaH2a+1)(SibH2b+1)(SicH2c+1)
through the stepwise general reaction(s):
a) one-step reaction:
A(SiR3)3+mX—SiaH2a+1→(SiR3)3−mA(SiaH2a+1)m+mX—SiR3,
b) two-step reactions:
A(SiR3)3+nX—SiaH2a+1→(SiR3)3−nA(SiaH2a+1)n+nX—SiR3
(SiR3)3−nA(SiaH2a+1)n+pX—(SibH2b+1)→(SiR3)3−n−pA(SiaH2a+1)n(SibH2b+1)p+pX—SiR3, or
c) three-step reactions:
A(SiR3)3+X—SiaH2a+1→(SiR3)2A(SiaH2a+1)+X—SiR3
(SiR3)2A(SiaH2a+1)+X—SibH2b+1→(SiR3)A(SiaH2a+1)(SibH2b+1)+X—SiR3
(SiR3)A(SiaH2a+1)(SibH2b+1)+X—SibH2b+1→A(SiaH2a+1)(SibH2b+1)(SicH2c+1)+X—SiR3;
alternatively, through a one-pot reaction with a mixture of two or three halo(poly)silanes:
A(SiR3)3+X—SiaH2a+1+yX—SibH2b+1+zX—SicH2c+1→A(SiaH2a+1)x(SibH2b−1)y(SicH2c+1)2(SiR3)(3−x−y−z)+(x+y+z)X—SiR3,
wherein
X=Cl, Br or I;
a
=
1
⁢
to
⁢
6
;
b
=
1
⁢
to
⁢
6
;
c
=
1
⁢
to
⁢
6
;
a
≠
b
≠
c
;
m
=
1
⁢
to
⁢
3
;
n
=
1
⁢
to
⁢
2
,
p
=
1
⁢
to
⁢
2
,
n
+
p
=
2
⁢
to
⁢
3
;
x
=
0
⁢
to
⁢
3
,
y
=
0
⁢
to
⁢
3
,
z
=
0
⁢
to
⁢
3
,
x
+
y
+
z
=
1
⁢
to
⁢
3
;
A=a Group V element selected from As, P, Sb, Bi;
and
R is selected from a C1 to C10, linear, branched or cyclic alkyl, alkenyl, alkynyl group.

120 more elements

Dependencies are inferred from the claim text.