Device for holding a tubular sio2 blank in an external deposition process and method for manufacturing a tubular sio2 blank
AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsWalter LEHMANN, Klaus-Uwe BADEKE
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AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsWalter LEHMANN, Klaus-Uwe BADEKE
Estimating the term…
A device for producing a tubular SiO2 blank in an external deposition process has a substrate tube and a substrate tube holder comprising a clamping device, which is designed to support the substrate tube and to rotate the substrate tube about an axis of rotation. In order to provide, on this basis, a reproducible and operationally reliable holder for a large-volume, tubular SiO2 blank in an external deposition process, it is proposed that the substrate tube holder comprise a clamping mechanism which has a first pressure unit abutting the first substrate tube end face, a second pressure unit abutting the second substrate tube end face, and at least one force element which is designed to generate an axial contact pressure with a force component acting in the direction of the longitudinal axis of the substrate tube.
A device for producing a tubular SiO2 blank in an external deposition process, comprising:
A method for producing a tubular SiO2 blank in an external deposition process, comprising the following method steps:
Dependencies are inferred from the claim text.