Actuator, element substrate, and liquid discharging head
AssigneeCanon Kabushiki Kaisha
InventorYOUICHI FUKAYA
Life of this patent
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Abstract
An actuator includes a diaphragm, a piezoelectric element that includes a first electrode layer that is in contact with the diaphragm, a second electrode layer, and a piezoelectric layer that has a first end and a second end, an electrode member that is connected to the second electrode layer at the first end side of the piezoelectric layer, and a sealing film that covers at least part of the piezoelectric element and in which a recessed portion is formed between the first end and the second end. In the first direction, a distance from the second end of the piezoelectric layer to an end of the recessed portion on the second end side is longer than a distance from the first end of the piezoelectric layer to an end of the recessed portion on the first end side.
Claims15
An actuator, comprising:
- a diaphragm that has a first face and that is provided to be capable of vibrating;
- a piezoelectric element that includes a first electrode layer that is in contact with the first face, a second electrode layer, and a piezoelectric layer that has a first end in a first direction parallel to the first face and a second end on an opposite side to the first end, the piezoelectric element being provided on the first face, with the first electrode layer, the piezoelectric layer, and the second electrode layer being stacked in that order in a second direction perpendicular to the first face;
- an electrode member that is connected to the second electrode layer at the first end side of the piezoelectric layer;
- and
- a sealing film that covers at least part of the piezoelectric element, and in which a recessed portion that is recessed in the second direction is formed between the first end and the second end, wherein
- in the first direction, a distance from the second end of the piezoelectric layer to an end of the recessed portion on the second end side is longer than a distance from the first end of the piezoelectric layer to an end of the recessed portion on the first end side.
An element substrate, comprising:
- a first channel substrate having a discharge orifice for discharging a liquid;
- and
- a second channel substrate having an actuator disposed at a position overlapping the discharge orifice as viewed from a second direction,
- the actuator including
- a diaphragm that has a first face and that is provided to be capable of vibrating,
- a piezoelectric element that includes a first electrode layer that is in contact with the first face, a second electrode layer, and a piezoelectric layer that has a first end in a first direction parallel to the first face and a second end on an opposite side to the first end, the piezoelectric element being provided on the first face, with the first electrode layer, the piezoelectric layer, and the second electrode layer being stacked in that order in a second direction perpendicular to the first face;
- an electrode member that is connected to the second electrode layer at the first end side of the piezoelectric layer, and
- a sealing film that covers at least part of the piezoelectric element, and in which a recessed portion that is recessed in the second direction is formed between the first end and the second end, wherein
- in the first direction, a distance from the second end of the piezoelectric layer to an end of the recessed portion on the second end side is longer than a distance from the first end of the piezoelectric layer to an end of the recessed portion on the first end side.
A liquid discharging head discharging a liquid from a discharge orifice by an actuator being driven by voltage being applied to a first electrode layer and a second electrode layer, the liquid discharging head comprising:
- a first channel substrate having a discharge orifice for discharging a liquid is formed;
- and
- a second channel substrate having an actuator disposed at a position overlapping the discharge orifice as viewed from a second direction,
- the actuator including
- a diaphragm that has a first face and that is provided to be capable of vibrating,
- a piezoelectric element that includes a first electrode layer that is in contact with the first face, a second electrode layer, and a piezoelectric layer that has a first end in a first direction parallel to the first face and a second end on an opposite side to the first end, the piezoelectric element being provided on the first face, with the first electrode layer, the piezoelectric layer, and the second electrode layer being stacked in that order in a second direction perpendicular to the first face;
- an electrode member that is connected to the second electrode layer at the first end side of the piezoelectric layer, and
- a sealing film that covers at least part of the piezoelectric element, and in which a recessed portion that is recessed in the second direction is formed between the first end and the second end, wherein,
- in the first direction, a distance from the second end of the piezoelectric layer to an end of the recessed portion on the second end side is longer than a distance from the first end of the piezoelectric layer to an end of the recessed portion on the first end side.
Dependencies are inferred from the claim text.