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US 2025/0050464 A1Published application
Conditioning disk with microfeatures
Assignee3M Innovative Properties Company
InventorsJunqing Xie, Matthew C. Fritz, Uma Rames Krishna Lagudu
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Abstract
A conditioning disk with microfeatures is described. More specifically, a conditioning disk with at least one discrete abrasive element and at least one microfeature. The asymmetry of the at least one microstructure may enable, based on orientation, a wide range of pad polishing parameters, such as surface roughness and pad wear rate.
Claims20
A pad conditioning disk, comprising:
- at least one discrete abrasive element, the at least one discrete abrasive element comprising at least one microfeature having a base and a top;
- wherein the at least one microfeature has at least three facets with at least three edges, each edge being between an adjacent pair of facets and extending from the base;
- wherein the at least three edges are not all a same length;
- and
- wherein the at least one microfeature has a leading edge, the leading edge being either
- (i) coincident with the shortest edge from a top plan view of the at least three edges, or
- (ii) if two edges of the at least three edges from a top plan view are a same length but shorter than the other edges, halfway in rotation between each of the two edges and extending from the base of the microfeature to the top;
- wherein the at least one discrete abrasive element is oriented and disposed on the pad conditioning disk such that the leading edge of the at least one microfeature forms an angle of at least 5 degrees with a direction of instantaneous rotation of the pad conditioning disk.
5 more elements
A method of forming a pad conditioning disk, comprising:
- providing a carrier;
- providing at least one discrete abrasive element, wherein the at least one discrete element includes at least one microfeature having a base and a top, the microfeature including at least three facets with at least three edges, each edge being between an adjacent pair of facets and extending from the base, wherein the at least three edges are not all a same length, and wherein the at least one microfeature has a leading edge, the leading edge being either
- (i) coincident with the shortest edge of the at least three edges, or
- (ii) if two edges of the at least three edges are a same length but shorter than the other edges, halfway in rotation between each of the two edges and extending from the base of the microfeature to the top,
- orienting and disposing the at least one discrete abrasive element on the carrier such that the leading edge of the at least one microfeature forms an angle of at least 5 degrees with a direction of instantaneous rotation of the pad conditioning disk.
2 more elements
Dependencies are inferred from the claim text.