Hydrophobization treatment apparatus, hydrophobization treatment method, and computer storage medium
AssigneeTokyo Electron Limited
InventorTeruhiko KODAMA
Life of this patent
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Abstract
A hydrophobization treatment apparatus for performing a hydrophobization treatment on a substrate, includes: a treatment container configured to house the substrate and form a treatment space; a first supply port configured to supply first gas from above the substrate in the treatment container to the substrate; and a second supply port configured to supply second gas from a position facing a central region of the substrate below the substrate in the treatment container to the substrate, the hydrophobization treatment apparatus being configured to be able to supply a hydrophobizing gas as the first gas from the first supply port and the second gas from the second supply port.
Claims15
A hydrophobization treatment apparatus performing a hydrophobization treatment on a substrate, comprising:
- a treatment container configured to house the substrate and form a treatment space;
- a first supply port configured to supply first gas from above the substrate in the treatment container to the substrate;
- and
- a second supply port configured to supply second gas from a position facing a central region of the substrate below the substrate in the treatment container to the substrate,
- the hydrophobization treatment apparatus being configured to be able to supply a hydrophobizing gas as the first gas from the first supply port and the second gas from the second supply port.
A hydrophobization treatment method for performing a hydrophobization treatment on a substrate, comprising
- selectively supplying a hydrophobizing gas from at least one of a first supply port provided above the substrate in a treatment container forming a treatment space and a second supply port provided at a position facing a central region of the substrate below the substrate in the treatment container.
A computer-readable storage medium storing a program running on a computer of a control unit for controlling a hydrophobization treatment apparatus to cause the hydrophobization treatment apparatus to execute a hydrophobization treatment method for performing a hydrophobization treatment on a substrate,
- the hydrophobization treatment method comprising selectively supplying a hydrophobizing gas from at least one of a first supply port provided above the substrate in a treatment container forming a treatment space and a second supply port provided at a position facing a central region of the substrate below the substrate in the treatment container.
Dependencies are inferred from the claim text.