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US 2025/0050329 A1Published application
Method for producing fine structures in the volume of a substrate composed of hard brittle material
AssigneeSchott AG
InventorsAndreas Ortner, Andreas Roters, Hauke Esemann, Markus Heiss-Chouquet, Fabian Wagner, Laura Brueckbauer, Stephanie Mangold, Vanessa Hiller
Life of this patent
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Abstract
A substrate composed of hard brittle material, the substrate including: a cavity on at least one side surface of the substrate, the cavity including a side wall, the cavity further including a bottom surface having a structure having a plurality of substantially hemispherical depressions.
Claims7
A substrate composed of hard brittle material, the substrate comprising:
- a cavity on at least one side surface of the substrate, the cavity including a side wall, the cavity further including a bottom surface having a structure having a plurality of substantially hemispherical depressions.
A microfluidic cell, comprising:
- a substrate in the form of a glass element having at least one cavity, the cavity including a side wall, the cavity further including a bottom surface having a structure having a plurality of substantially hemispherical depressions.
Dependencies are inferred from the claim text.