Transducer including piezoelectric element and method of producing same
AssigneeAlps Alpine Co., Ltd.
InventorsRyo ITO, Heishiro FUDO
Life of this patent
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Abstract
A transducer includes a flexible substrate, a piezoelectric element formed on a surface of the flexible substrate, and a support member, in which holes are formed, having a higher rigidity than the flexible substrate. The surface of the flexible substrate has an element region in which the piezoelectric element is continuous in a planar direction of the piezoelectric element. The support member is stacked to the flexible substrate in a manner such that the holes face the element region. The flexible substrate is freely movable in each of the holes, and a region of the flexible substrate corresponding to a region other than the holes of the support member is fixed to the support member.
Claims8
A transducer, comprising:
- a flexible substrate;
- a piezoelectric element formed on a surface of the flexible substrate, the surface of the flexible substrate having an element region in which the piezoelectric element is continuous in a planar direction of the piezoelectric element;
- and
- a support member, in which holes are formed, having a higher rigidity than the flexible substrate, the support member being stacked to the flexible substrate in a manner such that the holes face the element region,
- wherein
- the flexible substrate is freely movable in each of the holes, and a region of the flexible substrate corresponding to a region other than the holes of the support member is fixed to the support member.
A method of producing a transducer, the method comprising:
- forming an element region, in which a piezoelectric element is continuous in a planar direction, on a surface of a flexible substrate;
- forming a support member, in which holes are formed, using a material having a rigidity higher than the flexible substrate;
- and
- stacking the flexible substrate to the support member in a manner such that the holes face the element region, allowing the flexible substrate to freely move in the holes, and fixing a region of the flexible substrate, which corresponds to a region other than the holes of the support member, to the support member, to produce the transducer including the flexible substrate, and the piezoelectric element formed on the surface of the flexible substrate.
Dependencies are inferred from the claim text.