Vcsel with double oxide apertures
AssigneeII-Vi Delaware, Inc.
InventorsHanxing SHI, Richa DUBEY, Deepa GAZULA, Chris KOCOT, Charles ROXLO
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Abstract
In one example, a vertical cavity surface emitting laser (VCSEL) may include an active region to produce light at a wavelength, an emission surface to emit the light at the wavelength, a first oxide region spaced apart from the active region by a distance of at least a half-wavelength of the wavelength, a first oxide aperture in the first oxide region, a second oxide region between the first oxide region and the second oxide region, and a second oxide aperture in the second oxide region. The emitted light may have a divergence angle that is based on the respective positions and thicknesses of the first oxide region and the second oxide region.
Claims19
A vertical cavity surface emitting laser (VCSEL) comprising:
- an active region configured to produce light at a wavelength;
- a first oxide region having a first thickness and disposed adjacent to the active region, the first oxide region comprising a first aperture;
- a top mirror formed over the first oxide region, wherein the first oxide region being between the active region and the top mirror;
- and
- a second oxide region having a second thickness and spaced apart from the active region, wherein the first oxide region is between the active region and the second oxide region and the second oxide region is located at a position away from a node of a standing wave;
- wherein the light has a divergence angle based upon the first thickness of the first oxide region and the second thickness of the second oxide region.
Dependencies are inferred from the claim text.