Imprint apparatus, imprint method, and article manufacturing method

An imprint method of curing and forming a pattern of an imprint material sequentially in a plurality of shot areas on a substrate using a mold including a patterned part, the imprint method comprising:

• a measurement step of measuring a relative position between the substrate and the mold by detecting a mark formed on the substrate and a mark formed on the mold;
• an illumination step of illuminating a marks on the mold and the substrate such that a marks are able to be detected in the measurement step using a light amount adjusting mechanism for adjusting a light amount of light emitted from a light source;
• and
• a control step of curing the imprint material in a state in which the mold and the substrate have been aligned on the basis of a measurement result of the measurement step and then performing control such that adjustment of the light amount adjusting mechanism is started such that an illumination condition when a shot area on which a pattern is to be next formed is illuminated in the illumination step is satisfied.

An article manufacturing method that is performed by an imprint apparatus that cures and forms a pattern of an imprint material sequentially in a plurality of shot areas on a substrate using a mold including a patterned part and that includes

• an alignment measurement unit configured to measure a relative position between the substrate and the mold by detecting a mark formed on the substrate and a mark formed on the mold,
• an alignment illumination unit including a light amount adjusting mechanism for adjusting a light amount of light emitted from a light source and configured to illuminate a marks on the mold and the substrate such that a marks are able to be detected by the alignment measurement unit, and
• a control unit configured to cure the imprint material in a state in which the mold and the substrate have been aligned on the basis of a measurement result from the alignment measurement unit and then to perform control such that adjustment of the light amount adjusting mechanism is started such that an illumination condition when the alignment illumination unit illuminates a shot area on which a pattern is to be next formed is satisfied, the article manufacturing method comprising:
• a pattern forming step of forming a protruded/recessed pattern on the substrate using the imprint apparatus;
• a processing step of processing the substrate on which the pattern has been formed in the pattern forming step;
• and
• a process of manufacturing an article from the substrate processed in the processing step.