Optical position-measuring device
AssigneeJohannes Heidenhain GmbH
InventorsMichael HERMANN, Michael KUGLER
Life of this patent
Estimating the term…
Loading patent…
AssigneeJohannes Heidenhain GmbH
InventorsMichael HERMANN, Michael KUGLER
Estimating the term…
An optical position-measuring device for determining a relative position of two objects that are movable relative to one another along two measurement directions includes scanning units which are connected to one of the two objects and each include a light source, one or more gratings, and a detector assembly, and a scale which is connected to the other object. The scale includes a two-dimensional measuring graduation composed of structure elements which are periodically arranged along the measurement directions and have different optical properties, and reference marks which are integrated into the measuring graduation and have periodic and aperiodic sub-regions. Scanning of a respective reference mark allows a respective reference signal to be generated at a defined reference position along a measurement direction. The periodic sub-regions of the reference marks have a higher scanning efficiency than the surrounding measuring graduation.
An optical position-measuring device for determining a relative position of two objects that are movable relative to one another along at least a first and a second measurement direction, the optical position-measuring device comprising:
Dependencies are inferred from the claim text.