Process for forming a coating
OwnerPeter Michael HARRIS, Jun NI +2inventors
InventorsPeter Michael HARRIS, Jun NI, Deborah RAISBECK, Srikanth VARANASI
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Abstract
A chemical vapor deposition process is provided for forming a layer based on manganese oxide over a glass substrate. A gaseous mixture is formed and includes one or more manganese-containing compounds selected from the group consisting of bis(cyclopentadienyl)manganese(II), bis(ethylcyclopentadienyl)manganese (II), (methylcyclopentadienyl)manganese(I) tricarbonyl, and derivatives thereof, and one or more oxygen-containing precursors selected from the group consisting of an organic oxygen-containing compound and molecular oxygen. The gaseous mixture is directed toward and along the glass substrate, and is reacted over the glass substrate to form a manganese oxide coating thereon.
Claims22
-21. (canceled)
A chemical vapor deposition process for forming a manganese oxide coating over a glass substrate, comprising:
- providing a glass substrate;
- forming a gaseous mixture comprised of one or more manganese-containing compounds selected from the group consisting of bis(cyclopentadienyl)manganese(II), bis(ethylcyclopentadienyl)manganese (II), (methylcyclopentadienyl)manganese(I) tricarbonyl, and derivatives thereof, and one or more oxygen-containing precursors selected from the group consisting of an organic oxygen-containing compound and molecular oxygen;
- directing the gaseous mixture toward and along the glass substrate;
- and
- reacting the gaseous mixture over the glass substrate to form a coating of manganese oxide over the glass substrate.
Dependencies are inferred from the claim text.