Method of manufacturing an electronic component
AssigneeCommissariat à I'Énergie Atomique et aux Énergies Alternatives
InventorsChristelle Boixaderas, Nicolas Posseme, Benjamin Fontaine, Jerome Dubois, Pascal Gouraud
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Abstract
A method of manufacturing an electronic component including a step a) of etching at least a first layer made of a material containing germanium and including one element amongst oxygen, sulfur, selenium and tellurium followed, without bringing back into contact with oxygen, by a step b) of treating the etched flanks of the first layer with a hydrogen plasma.
Claims15
A method of manufacturing an electronic component comprising a step a) of etching at least a first layer made of a material containing germanium and comprising one element amongst oxygen, sulfur, selenium and tellurium followed, without bringing back into contact with oxygen, by a step b) of treating the etched flanks of the first layer with a hydrogen plasma.
Dependencies are inferred from the claim text.