Method of manufacturing magnetic memory device
AssigneesSamsung Electronics Co., Ltd., Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorsUnghwan Pi, Stuart Papworth Parkin, Jaechun Jeon, Jaekeun Kim, Andrea Migliorini
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Abstract
According to a method of manufacturing a magnetic memory device, various types of magnetic memory devices can be manufactured at low cost by manufacturing a plurality of magnetic modules by using a delamination phenomenon of pattern segments and stacking the plurality of magnetic modules to complete a stacked memory device.
Claims20
A method of manufacturing a magnetic memory device, the method comprising:
- forming a first pattern segment on an upper surface of a base substrate;
- forming a first film stack on the upper surface of the base substrate and the first pattern segment, the first film stack including at least one magnetic layer;
- forming a first stack segment by delaminating the first pattern segment and a portion of the first film stack overlapping the first pattern segment;
- providing the first stack segment on an upper surface of a stack substrate;
- patterning the first stack segment to form a first magnetic module constituting a first portion of the magnetic memory device;
- forming a second magnetic module constituting a second portion of the magnetic memory device by forming a second pattern segment, forming a second film stack including at least one magnetic layer on the second pattern segment, forming a second stack segment by delaminating the second pattern segment and a portion of the second film stack overlapping the second pattern segment, and patterning the second stack segment;
- and
- coupling the second magnetic module onto the first magnetic module.
A method of manufacturing a magnetic memory device, the method comprising:
- forming each of a first magnetic module, a second magnetic module, and a third magnetic module constituting the magnetic memory device;
- picking up the first magnetic module by providing an adhesive stamp thereon;
- attaching the second magnetic module under the first magnetic module attached to the adhesive stamp;
- attaching the third magnetic module under the second magnetic module and opposite the first magnetic module attached to the adhesive stamp;
- and
- separating the adhesive stamp from the first magnetic module having the second magnetic module attached thereunder and the third magnetic module attached under the second magnetic module,
- wherein each of the first, second, and third magnetic modules comprises a respective pattern segment comprising a stacked structure including multiple layers of a two-dimensional sheet material comprising hexagonal boron nitride.
A method of manufacturing a magnetic memory device, the method comprising:
- forming each of a first magnetic module, a second magnetic module, and a third magnetic module constituting the magnetic memory device;
- picking up the first magnetic module by providing an adhesive stamp thereon, attaching the first magnetic module onto an upper surface of a stack substrate, and separating the adhesive stamp from the first magnetic module;
- picking up the second magnetic module by providing the adhesive stamp thereon, attaching the second magnetic module onto the first magnetic module, and separating the adhesive stamp from the second magnetic module;
- picking up the third magnetic module by providing the adhesive stamp thereon, attaching the third magnetic module onto the second magnetic module, and separating the adhesive stamp from the third magnetic module,
- wherein each of the first, second, and third magnetic modules a respective pattern segment comprising a stacked structure including multiple layers of a two-dimensional sheet material comprising hexagonal boron nitride.
Dependencies are inferred from the claim text.