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US 2025/0040281 A1Published application
Micro lens arrays and methods of formation thereof
AssigneeSTMicroelectronics S.r.l.
InventorYu-Tsung Lin
Life of this patent
Estimating the term…
Abstract
A method of forming a device, the method including depositing a first photoresist layer over a substrate, forming an array of seed lenses by patterning and reflowing the first photoresist layer, a dimension of the array of seed lenses varying across the substrate, forming a second photoresist layer over the array of seed lenses, and forming a microlens array by patterning and reflowing the second photoresist layer.
Claims20
A device comprising:
- a microlens array comprising an array of lenses, each of the array of lenses being configured to be positioned over a respective photosensitive section of a plurality of photosensitive sections of an optoelectronic device,
- wherein dimensions of each of the array of lenses changes from a center of the microlens array to an edge of the microlens array, and
- wherein each of the array of lenses comprises a seed portion and a major lens portion covering the seed portion.
A device comprising:
- a substrate;
- an array of seed lenses formed from a first photoresist layer on the substrate, wherein dimensions of the array of seed lenses vary across the substrate;
- and
- a microlens array formed from a second photoresist layer over the array of seed lenses, wherein each lens of the microlens array comprises a seed portion from the array of seed lenses and a major lens portion covering the seed portion, and wherein a sagittal height of each lens in the microlens array progressively decreases from a center of the microlens array to an edge of the microlens array.
1 more element
A device comprising:
- an optoelectronic device having a plurality of photosensitive regions;
- a microlens array attached to the optoelectronic device, the microlens array comprising an array of seed lenses formed from a first photoresist layer, each seed lens having a focal length determined based on a chief ray angle for its respective photosensitive region;
- and
- an array of major lenses formed from a second photoresist layer over the array of seed lenses, wherein each major lens and its underlying seed lens form a complete lens of the microlens array, and wherein dimensions of each complete lens vary based on its position from a center of the device to an edge of the device.
1 more element
Dependencies are inferred from the claim text.