Integrated circuit, system and method of forming same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei PENG, Chih-Min HSIAO, Jiann-Tyng TZENG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei PENG, Chih-Min HSIAO, Jiann-Tyng TZENG
Estimating the term…
A method of fabricating an integrated circuit includes fabricating a set of transistors and a dummy via in a front-side of a substrate, performing thinning on a back-side of the substrate opposite from the front-side, fabricating a first set of vias and a first set of conductors on the back-side of a thinned substrate on a first level, the first set of conductors being electrically coupled to the set of transistors by the first set of vias, fabricating a second set of vias on the back-side of the thinned substrate, and depositing a conductive material on the back-side of the thinned substrate on a second level thereby forming a second set of conductors, the second set of conductors being electrically coupled to the first set of conductors by the second set of vias.
A method of fabricating an integrated circuit, the method comprising:
A method of fabricating an integrated circuit, the method comprising:
A method of fabricating an integrated circuit, the method comprising:
Dependencies are inferred from the claim text.