Discharge electrodes, manufacturing method of anode, and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device including a laser chamber including discharge electrodes;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the discharge electrodes being discharge electrodes to be used in the gas laser device for exciting a laser gas containing fluorine by discharge, and including a cathode and an anode,
• the anode being arranged as facing the cathode and including an electrode base member including a metal, and a coating layer including an insulating material and coating a part of a side surface, parallel to a longitudinal direction, of the electrode base member, and
• the coating layer including a first portion coating a first region of the side surface and a second portion coating a second region of the side surface, located farther from the cathode than the first region in a discharge direction perpendicular to the longitudinal direction, and being thicker than the first portion.