Dual channel flow plate for wet processing
AssigneeYield Engineering Systems, Inc.
InventorsVladimir Kudriavtsev, Rajeev Bajaj, Christopher Lane, Kevin McGillivray, Sossan Wali, Bob Hanopulus, Hratch Mouradian
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Abstract
An apparatus for wet chemical processing includes a processing tank that configured to contain a liquid chemical composition and support a plurality of substrates in the liquid chemical composition. A flow plate may be disposed in the processing tank below the plurality of substrates. The flow plate may include a plurality of liquid nozzles configured to direct the liquid chemical composition into the tank and a plurality of gas outlets configured to direct a gas into the tank.
Claims25
An apparatus for wet chemical processing of a plurality of substrates, comprising:
- a processing tank configured to contain a liquid chemical composition and support the plurality of substrates in the liquid chemical composition;
- and
- a flow plate disposed in the liquid chemical composition in the processing tank such that, when the plurality of substrates are supported in the liquid chemical composition, the flow plate is positioned below the plurality of substrates, and wherein the flow plate includes,
- a plurality of liquid nozzles configured to direct the liquid chemical composition towards the plurality of substrates;
- and
- a plurality of gas outlets configured to direct a gas towards the plurality of substrates.
The apparatus of claim, wherein a number of liquid nozzles in the plurality of liquid nozzles is same as the number of gas outlets in the plurality of gas outlets.
A method of wet chemical processing a plurality of substrates, comprising:
- positioning a plurality of substrates in a processing tank containing a liquid chemical composition;
- directing the liquid chemical composition into the processing tank through a plurality of liquid nozzles of a flow plate positioned below the plurality of substrates;
- and
- directing a gas into the processing tank through a plurality of gas outlets of the flow plate.
Dependencies are inferred from the claim text.