Measurement apparatus and measurement method
AssigneeYokogawa Electric Corporation
InventorsAkihiro Murata, Shoma Takeda
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AssigneeYokogawa Electric Corporation
InventorsAkihiro Murata, Shoma Takeda
Estimating the term…
A measurement apparatus includes a vaporization chamber in which a sample containing a target component is placed, a measurement chamber that is spatially connected to the vaporization chamber and forms enclosed space integrally with the vaporization chamber, a light source that applies, to the measurement chamber, laser light whose wavelength varies, a detector that detects the laser light having been applied from the light source and having passed through the measurement chamber, and an arithmetic unit that calculates the amount of the target component contained in the sample by analyzing a light-receiving signal of the laser light detected by the detector. The arithmetic unit acquires the amount of the target component, based on an integral value of a spectrum of absorbance of the laser light that is absorbed by the target component while the laser light passes through an interior of the measurement chamber.
A measurement apparatus comprising:
A measurement method by a measurement apparatus, the measurement method comprising:
Dependencies are inferred from the claim text.