Thick photo-patternable hybrid inorganic materials
AssigneeMeta Platforms Technologies, LLC
InventorAlejo LIFSCHITZ ARRIBIO
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Abstract
Techniques disclosed herein relate to photo-patternable latent-chemistry inorganic materials. An example of the photo-patternable latent-chemistry inorganic materials includes a sol-gel material comprising a solution containing a tin dichloride salt, at least one alcohol containing solvent, and optionally a photo-acid generator or photo-acid. The sol-gel material, upon selective photo-excitation (which forms a latent pattern with latent chemistry in the sol-gel material) and blanket thermal annealing, can form a coating having a formula SnO(n)X(m), where the n:m ratio and/or n-m values of the coating vary across regions of the coating, such that a refractive index of the coating varies across regions of the coating, without affecting the coating's transparency for visible light.
Claims20
A photo-sensitive sol-gel material comprising:
- an alcohol-containing solvent;
- and
- a tin dichloride salt and metal oxide nanoparticles mixed with the alcohol-containing solvent,
- wherein the photo-sensitive sol-gel material, upon deposition, selective photo-excitation, and thermal annealing, forms a film including SnO(n)X(m) and the metal oxide nanoparticles, and wherein at least one of an m:n ratio, an n value, or an m value of SnO(n)X(m) varies across regions of the film as a result of the selective photo-excitation and thermal annealing, such that a refractive index of the film varies across the regions of the film.
A method comprising:
- depositing a photo-sensitive sol-gel material on a substrate to form a coating layer, the photo-sensitive sol-gel material including:
- an alcohol-containing solvent;
- and
- a tin dichloride salt and metal oxide nanoparticles mixed with the alcohol-containing solvent;
- selectively exposing regions of the coating layer to light having a wavelength greater than 193 nm;
- and
- annealing the coating layer at an annealing temperature lower than 300° C.
A photo-reactive sol-gel material comprising:
- an alcohol-containing solvent;
- and
- a tin dichloride salt and a resin mixture mixed with the alcohol-containing solvent,
- wherein the photo-reactive sol-gel material, upon deposition, selective photo-excitation, and thermal annealing, forms a film including SnO(n)X(m), wherein at least one of an n:m ratio, an n value, or an m value of SnO(n)X(m) varies across regions of the film as a result of the selective photo-excitation and thermal annealing, such that a refractive index of the film varies across the regions of the film.
Dependencies are inferred from the claim text.