Methods and apparatus for stabilizing vanadium compounds
AssigneeASM IP Holding B.V.
InventorsCharles Dezelah, Eric James Shero
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Abstract
Methods of stabilizing a vanadium compound in a solution, compositions including a vanadium compound and a stabilizing agent, apparatus including the composition, systems that use the composition, and methods of using the compositions, apparatus, and systems are disclosed. Use of the stabilizing agent allows for use of desired precursors, while mitigating unwanted decomposition of the precursors.
Claims20
A method of stabilizing a vanadium compound in a solution, the method comprising incorporating an effective amount of one or more stabilizing agents into said solution, wherein the one or more stabilizing agents comprise one or more of an organic molecule comprising a sulfur heteroatom, an ether of the formula O[R1]2, a tertiary amine of the formula N[R2]3, pyran, tetrahydropyran, pyridazine, pyrimidine, pyrazine, 1,2,4-triazine, and an aprotic non-aromatic heterocyclic amine,
- wherein all R1 groups are independently a C1-C20 alkyl or a C1-C20 aryl group, and wherein where all R2 groups are independently a C1-C20 aryl group.
A composition comprising a vanadium compound and an effective amount of one or more stabilizing agents, wherein the one or more stabilizing agents comprise one or more of an organic molecule comprising a sulfur heteroatom, an ether of the formula O[R1]2, a tertiary amine of the formula N[R2]3, pyran, tetrahydropyran, pyridazine, pyrimidine, pyrazine, 1,2,4-triazine, and an aprotic non-aromatic heterocyclic amine,
- wherein all R1 groups are independently a C1-C20 alkyl or a C1-C20 aryl group, and wherein where all R2 groups are independently a C1-C20 aryl group.
A vessel for providing a precursor for gas-phase processing, wherein the vessel contains a vanadium compound and one or more stabilizing agents, wherein the one or more stabilizing agents comprise one or more of an organic molecule comprising a sulfur heteroatom, an ether of the formula O[R1]2, a tertiary amine of the formula N[R2]3, pyran, tetrahydropyran, pyridazine, pyrimidine, pyrazine, 1,2,4-triazine, and an aprotic non-aromatic heterocyclic amine,
- wherein all R1 groups are independently a C1-C20 alkyl or a C1-C20 aryl group, and wherein where all R2 groups are independently a C1-C20 aryl group.
A system comprising:
- one or more reaction chambers;
- a source comprising a composition comprising a vanadium compound and one or more stabilizing agents;
- and
- a controller,
- wherein the controller is configured to control a flow of the composition or the vanadium compound into at least one of the one or more reaction chambers, and
- wherein the one or more stabilizing agents comprise one or more of an organic molecule comprising a sulfur heteroatom, an ether of the formula O[R1]2, a tertiary amine of the formula N[R2]3, pyran, tetrahydropyran, pyridazine, pyrimidine, pyrazine, 1,2,4-triazine, and an aprotic non-aromatic heterocyclic amine,
- wherein all R1 groups are independently a C1-C20 alkyl or a C1-C20 aryl group, and wherein where all R2 groups are independently a C1-C20 aryl group.
Dependencies are inferred from the claim text.