Pad removal method and device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChunHung CHEN, Sheng-Chen WANG
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Abstract
A pad removal device includes a pad guide extending along a first direction. The pad guide includes a first affixing component configured to affix a first end of the pad guide to a pad at a first pad location, and a second affixing component configured to affix a second end of the pad guide to the pad at a second pad location different from the first pad location. The pad removal device further includes a first actuator attached to the first end of the pad guide. The pad removal device further includes a control assembly coupled to the actuator, wherein the control assembly is configured to cause the first actuator to move the first end toward the second end along the first direction.
Claims20
A pad removal device comprising:
- a pad guide extending along a first direction, wherein the pad guide comprises:
- a first affixing component configured to affix a first end of the pad guide to a pad at a first pad location, and
- a second affixing component configured to affix a second end of the pad guide to the pad at a second pad location different from the first pad location, wherein a central portion of the pad guide between the first affixing component and the second affixing component is free of any affixing components;
- an actuator attached to the pad guide;
- and
- a control assembly coupled to the actuator, wherein the control assembly is configured to cause the actuator to move the first end toward the second end along the first direction.
A pad removal device comprising:
- a pad guide extending along a first direction, wherein the pad guide comprises:
- a first affixing component configured to affix a first end of the pad guide to a pad at a first pad location, and a second affixing component configured to affix a second end of the pad guide to the pad at a second pad location different from the first pad location;
- a first actuator attached to the first end of the pad guide;
- and
- a control assembly coupled to the actuator, wherein the control assembly is configured to cause the first actuator to move the first end toward the second end along the first direction.
A pad removal device comprising:
- a pad guide extending along a first direction, wherein the pad guide comprises:
- a first affixing component configured to affix a first end of the pad guide to a pad at a first pad location, and
- a second affixing component configured to affix a second end of the pad guide to the pad at a second pad location different from the first pad location;
- a first actuator attached to the first end of the pad guide, wherein the first actuator is configured to move the first end toward the second end;
- and
- a control assembly coupled to the actuator, wherein the control assembly is configured to control the actuator, and the control assembly comprises a user interface.
Dependencies are inferred from the claim text.