US 2025/0031484 A1 · AVALANCHE PHOTODIODE SENSOR AND DISTANCE MEASURING DEVICE

Abstract

An avalanche photodiode sensor according to an embodiment includes a first semiconductor substrate and a second semiconductor substrate bonded to a first surface of the first semiconductor substrate, wherein the first semiconductor substrate includes a plurality of photoelectric conversion portions arranged in a matrix and an element separation portion for element-separating the plurality of photoelectric conversion portions from each other, the plurality of photoelectric conversion portions include a first photoelectric conversion portion, the element separation portion has a first element separation region and a second element separation region, the first photoelectric conversion portion is arranged between the first element separation region and the second element separation region, the first semiconductor substrate further includes a plurality of concave-convex portions arranged on a second surface opposite to the first surface and arranged between the first element separation region and the second element separation region, and the second semiconductor substrate includes a reading circuit connected to each of the photoelectric conversion portions.

Claims20

Dependent claims

A light detecting device, comprising:

a first chip including:
a first semiconductor substrate including:
a plurality of pixels including avalanche photodiodes;
a separation portion for separating the plurality of avalanche photodiodes from each other;
and
a plurality of concave-convex portions, each of the plurality of concave-convex portions arrange on a light incident side of the first semiconductor substrate for each of the plurality of pixels;
and
a first wiring layer;
and
a second chip including:
a second semiconductor substrate;
and
a second wiring layer,
wherein the first chip is bonded to the second chip such that the first and second wiring layers face each other, and
wherein each of the plurality of concave-convex portions are divided into four portions in a plan view.

12 more elements

Dependencies are inferred from the claim text.

Avalanche photodiode sensor and distance measuring device

Life of this patent

Avalanche photodiode sensor and distance measuring device

Life of this patent

Abstract

Claims20