Photoelectric conversion device and equipment
AssigneeCanon Kabushiki Kaisha
InventorTAKESHI AOKI
Life of this patent
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Abstract
A photoelectric conversion device is provided. The device includes: a semiconductor layer having a photoelectric conversion element; a wiring structure; and contact plug that connect the semiconductor layer and a wiring pattern arranged in a wiring layer closest to the semiconductor layer among wiring layers included in the wiring structure. A light reflecting layer through which the contact plug penetrate is arranged between the wiring layer and the semiconductor layer, and the light reflecting layer has a periodic structure in which a first layer constituted by one of a dielectric and a semiconductor and a second layer constituted by one of a dielectric and a semiconductor that are different from the first layer are periodically stacked.
Claims16
A photoelectric conversion device comprising:
- a semiconductor layer having a photoelectric conversion element;
- a wiring structure;
- and contact plug that connect the semiconductor layer and a wiring pattern arranged in a wiring layer closest to the semiconductor layer among wiring layers included in the wiring structure,
- wherein a light reflecting layer through which the contact plug penetrate is arranged between the wiring layer and the semiconductor layer, and
- the light reflecting layer has a periodic structure in which a first layer constituted by one of a dielectric and a semiconductor and a second layer constituted by one of a dielectric and a semiconductor that are different from the first layer are periodically stacked.
Dependencies are inferred from the claim text.