Method and electrical contact element
AssigneeRohde & Schwarz GmbH & Co. KG
InventorsMathias NAGEL, Frank EBERHARDT, Michaela SCHLEUDER
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Abstract
The present disclosure provides a method for manufacturing an electrical contact element on a circuit structure, the method comprising depositing a separation layer on a carrier substrate, wherein the carrier substrate comprises the circuit structure, forming a structuring layer with a predefined structure on a basic layer that is arranged between the separation layer and the structuring layer, adding an electrical contact element layer by depositing electrically conductive material on the basic layer via the structuring layer according to the predefined structure, and removing the separation layer, and the structuring layer. Further, the present disclosure provides a respective measurement application device.
Claims23
A method for manufacturing an electrical contact element on a circuit structure, the method comprising:
- depositing a separation layer on a carrier substrate, wherein the carrier substrate comprises the circuit structure;
- forming a structuring layer with a predefined structure on a basic layer that is arranged between the separation layer and the structuring layer;
- adding an electrical contact element layer by depositing electrically conductive material on the basic layer via the structuring layer according to the predefined structure;
- and
- removing the separation layer, and the structuring layer.
A Measurement application device comprising:
- an electrical contact element manufactured by:
- depositing a separation layer on a carrier substrate, wherein the carrier substrate comprises the circuit structure;
- forming a structuring layer with a predefined structure on a basic layer that is arranged between the separation layer and the structuring layer;
- adding an electrical contact element layer by depositing electrically conductive material on the basic layer via the structuring layer according to the predefined structure;
- and
- removing the separation layer, and the structuring layer;
- wherein the electrical contact element comprises:
- at least one mesh structure.
Dependencies are inferred from the claim text.