Microelectromechanical device, microelectromechanical microphone and method for producing a microelectromechanical device
OwnerJochen Reinmuth, Thomas Friedrichinventors
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Abstract
A microelectromechanical device for capacitive fluid pressure measurement. The device has a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, in which cavity a counter electrode is arranged, wherein the counter electrode has a plurality of radial etch channels which extend radially from the center of the counter electrode to an edge of the counter electrode. A microelectromechanical microphone, and a method for producing a microelectromechanical device, are also described.
Claims14
A microelectromechanical device for capacitive fluid pressure measurement, the device comprising:
- a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, a counter electrode being arranged in the cavity;
- wherein the counter electrode includes a plurality of radial etch channels which extend radially from a counter electrode center to a counter electrode edge.
A microelectromechanical microphone for capacitive sound pressure measurement, comprising:
- a microelectromechanical device including:
- a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, a counter electrode being arranged in the cavity,
- wherein the counter electrode includes a plurality of radial etch channels which extend radially from a counter electrode center to a counter electrode edge;
- and
- a signal processing unit configured to apply and process signals from the microelectromechanical device.
A method for producing a microelectromechanical device for capacitive fluid pressure measurement having a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, a counter electrode being arranged in the cavity, wherein method comprising:
- gradually applying and structuring material layers on a substrate;
- forming the cavity is formed by applying and subsequently etching at least one sacrificial layer;
- wherein during manufacture, a counter electrode layer is applied to form a counter electrode, and the counter electrode layer and/or the sacrificial layer is structured in such a way that a plurality of radial etch channels is formed in the counter electrode and/or in the sacrificial layer, wherein the radial etch channels in the counter electrode extend:
- (i) radially from a counter electrode center to a counter electrode edge, and/or (ii) in the sacrificial layer.
Dependencies are inferred from the claim text.