Methods and structures for generating smooth electrodes and electrode structures with a uniformly smooth surface

A protected structure for generating an electrode structure comprising a uniformly smooth surface, the protected structure comprising:

• a substrate;
• one or more electrodes disposed on at least a portion of the substrate;
• and
• a sacrificial cap disposed on each of the one or more electrodes.

An electrode structure comprising a uniformly smooth surface, the electrode structure comprising:

• a substrate;
• a planarization film disposed on the substrate, the planarization film comprising an upper surface;
• and
• one or more electrodes disposed on the substrate,
• wherein a sacrificial cap on each of the one or more electrodes preserved the uniformity of the surface of the electrode structure during a first planarization procedure, and
• wherein the one or more electrodes and the upper surface of the planarization film were smoothed by a second planarization procedure.

A piezoelectric structure with increased surface uniformity, the piezoelectric structure comprising:

• an electrode structure comprising a uniformly smooth surface, the electrode structure comprising:
• a substrate;
• a planarization film disposed on the substrate, the planarization film comprising an upper surface;
• and
• one or more electrodes disposed on the substrate,
• wherein a sacrificial cap on each of the one or more electrodes preserved the uniformity of the surface of the electrode structure during a first planarization procedure, and
• wherein the one or more electrodes and the upper surface of the planarization film were smoothed by a second planarization procedure;
• and
• a piezoelectric material layer disposed on a top surface of the one or more electrodes, the piezoelectric material layer comprising a c-axis having an orientation substantially perpendicular to a top surface of each of the one or more electrodes.