High-frequency power supply
AssigneeKyosan Electric Mfg. Co., Ltd.
InventorUnbou Tei
Life of this patent
Estimating the term…
Abstract
A high-frequency power supply (10) uses one pulse conversion/variable gain amplification unit (23) to perform two processing steps which are converting an RF signal into pulses and controlling an output level, and uses one control signal (27) to perform the pulse conversion and the output level control by the pulse conversion/variable gain amplification unit (23), thereby obviating the need for a modulation unit, which is a factor in the generation of jitter, overshoot, and undershoot, and reducing the number of control lines (29) for sending the control signal (27) to one control line. Due to this configuration, the jitter, overshoot, and undershoot generated in an RF pulse signal can be prevented, and the RF-signal pulse conversion and output level control are performed simultaneously using one control line (29).
Claims19
1-10. (canceled)
A high-frequency power supply, comprising:
- an RF pulse signal generation unit that converts an RF signal into pulses to generate an RF pulse signal;
- and
- a control unit that outputs setting data for controlling the RF pulse signal generation unit,
- wherein the setting data is frequency setting data for setting a frequency of the RF signal and control setting data for setting a cycle and a duty ratio of the RF pulse signal as well as an output level of the RF pulse signal,
- the RF pulse signal generation unit comprises:
- an RF signal generation unit that generates, based on the frequency setting data, an RF signal at a frequency set in the frequency setting data;
- a pulse conversion/gain control signal generation unit that generates, based on the control setting data, a control signal for performing pulse conversion control on the RF signal in the cycle and at the duty ratio set in the control setting data and level control on the RF signal at the output level set in the control setting data;
- a pulse conversion/variable gain amplification unit that generates the RF pulse signal from the RF signal based on the control signal;
- and
- a single control line that connects the pulse conversion/gain control signal generation unit to the pulse conversion/variable gain amplification unit to transmit the control signal,
- the pulse conversion/variable gain amplification unit performs, based on the control signal, the pulse conversion control for converting the RF signal into pulses in the set cycle and at the set duty ratio, variable control on an amplification gain of the RF signal, and the level control on the level of the RF signal to be the set output level.
Dependencies are inferred from the claim text.