Electrostatic chuck module
AssigneeSamsung Electronics Co., Ltd.
InventorNaoyuki TAKADA
Life of this patent
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Abstract
An electrostatic chuck module operates at temperatures above the heat resistance temperature of a resin. The electrostatic chuck module includes: a base that includes a flow path for a coolant disposed below the base, a concave part disposed on the base, and a convex part disposed along an outer circumference of the base; an insulator disposed in the concave part of the base; a resistance heating element disposed on or within the insulator; a crack plate disposed on the insulator and the resistance heating element; and a ceramics plate disposed on the crack plate and that includes an electrode that adsorbs a target object with static electricity. The convex part of the base is bonded to the crack plate.
Claims20
An electrostatic chuck module, comprising:
- a base that includes a flow path for a coolant disposed below the base, a concave part disposed on the base, and a convex part, which is disposed along an outer circumference of the base;
- an insulator disposed in the concave part of the base;
- a resistance heating element disposed on or within the insulator;
- a crack plate disposed on the insulator and the resistance heating element;
- and
- a ceramics plate disposed on the crack plate and that includes an electrode that adsorbs a target object with static electricity,
- wherein the convex part of the base is bonded to the crack plate.
An electrostatic chuck module, comprising:
- a base that includes a flow path for a coolant disposed below the base, a concave part disposed on the base, and a convex part disposed along an outer circumference of the base;
- an insulator disposed in the concave part of the base;
- a resistance heating element disposed on or within the insulator;
- and
- a crack plate disposed on the resistance heating element and in contact with the convex part,
- wherein a width of the convex part is between 2 mm and 5 mm.
An electrostatic chuck module, comprising:
- a base that includes a flow path for a coolant disposed below the base, a concave part disposed on the base, and a convex part disposed along an outer circumference of the base;
- an insulator disposed in the concave part of the base;
- a resistance heating element disposed on or within the insulator;
- an inorganic adhesive disposed on the resistance heating element;
- and
- a crack plate disposed on the inorganic adhesive, wherein the inorganic adhesive fixes the crack plate to the insulator and the resistance heating element such that the crack plate is in contact with the convex part and spaced apart from the concave part.
Dependencies are inferred from the claim text.