Method and device to distribute gas into a container
AssigneeEntegris, Inc.
InventorsMark V. Smith, Matthew A. Fuller, Shawn D. Eggum
Life of this patent
Estimating the term…
Abstract
A method and purge gas assembly for supplying or distributing flow of purge gas into a substrate container is provided. The purge gas assembly includes a gas distributor comprising at least one outlet and a purge module comprising an inlet for receiving a flow of purge gas, a check valve, and an outlet. A combination of the gas distributor and purge module form a chamber. The chamber is configured to supply the purge gas to the at least one outlet of the gas distributor.
Claims20
A method of distributing flow of purge gas into a substrate container, comprising:
- receiving a stream of purge gas at an inlet of a purge module;
- supplying the purge gas from an outlet of the purge module into a chamber formed by a combination of the purge module and a gas distributor of a purge gas assembly, the gas distributor having at least one outlet;
- and
- dividing, in the chamber, the purge gas into at least a first flow path to supply the purge gas to the at least one outlet of the gas distributor.
A purge gas assembly for supplying purge gas to a substrate container, the purge gas assembly comprising:
- a gas distributor comprising at least one outlet;
- a purge module comprising an inlet for receiving a flow of the purge gas, a check valve, and an outlet;
- wherein a combination of the gas distributor and the purge module form a chamber, and
- the chamber is configured to supply the purge gas to the at least one outlet of the gas distributor.
A method for assembling a substrate container having a gas distributing device comprising:
- attaching a purge gas assembly to a bottom wall of the substrate container, wherein the purge gas assembly comprises a gas distributor comprising at least one outlet;
- assembling a purge module comprising an inlet for receiving a flow of purge gas, a check valve, and an outlet;
- inserting the purge module into the gas distributor to form a chamber such that the chamber is configured to supply the purge gas to the at least one outlet, wherein the method is performed externally of the substrate container.
Dependencies are inferred from the claim text.