Valves for charged particle beam microscope, valve member and charged particle beam microscope

A valve, comprising:

• a valve seat comprising a shielding member around an opening of the shielding member;
• and
• a valve member, comprising:
• a valve member body having a first surface and a side surface;
• a sealing ring supported by the first surface;
• and
• an electrically conducting shielding member supported by the side surface,
• wherein:
• the valve member is movable between first and second positions;
• in the first position of the valve member, the sealing ring abuts the shielding member to seal the opening;
• in the second position of the valve member, the valve member is spaced apart from the opening, and the sealing ring is shielded by the shielding member;
• and
• in the second position of the valve member, the valve member is spaced apart from the opening, and the side surface faces the opening.

A valve, comprising:

• a valve seat having an opening;
• a valve member comprising a valve member body and a sealing ring supported by a first surface of the valve member body;
• and
• a lubricant disposed at a point of sliding contact between the valve member and a further part of the valve,
• wherein:
• the valve member is movable between first and second positions;
• in the first position of the valve member, the sealing ring seals the opening;
• and
• in the second position of the valve member, the valve member is spaced apart from the opening.