Measurement apparatus that measures position information of measurement target in predetermined direction

A machine learning model that generates a correction value for measuring position information of a measurement target in a first direction,

• wherein the machine learning model is configured to generate the correction value based on a feature quantity which is related to a second direction different from the first direction and is obtained from image data of the measurement target, and
• the correction value is an estimated error amount of the position information of the measurement target in the first direction obtained from the image data.

A method of processing in a computer that generates a machine learning model to be used in a measurement apparatus for measuring position information of a measurement target in a first direction, the method comprising:

• obtaining, from image data generated by capturing an image of the measurement target by a scope of the measurement apparatus, a feature quantity related to a second direction different from the first direction;
• and
• performing machine learning by using, as input data of a machine learning model, the obtained feature quantity and using, as supervised data, a difference between position information of the measurement target measured by an external inspection apparatus and position information obtained by the measurement apparatus.

A computer that generates a machine learning model to be used in a measurement apparatus for measuring position information of a measurement target in a first direction, comprising:

• an obtainment unit configured to obtain, from image data generated by capturing an image of the measurement target by a scope of the measurement apparatus, a feature quantity related to a second direction different from the first direction;
• and
• a machine learning controller configured to perform machine learning by using, as input data of a machine learning model, the obtained feature quantity and using, as supervised data, a difference between position information of the measurement target measured by an external inspection apparatus and position information obtained by the measurement apparatus.