Spectrum Processing Device, Specimen Analyzing Device, and Spectrum Processing Method
AssigneeJEOL Ltd.
InventorsYuka Ebata, Atsuhiro Fujii
Life of this patent
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Abstract
A spectrum processing device includes a data acquiring unit configured to acquire, for each of pixels expressing positions on a specimen, spectrum imaging data in which a pixel spectrum based on a signal from the specimen is stored; an extraction unit configured to compare, for each of the pixels, the pixel spectrum and a representative spectrum selected from the spectrum imaging data, and extract a plurality of the pixel spectra from the spectrum imaging data, based on a comparison result; and a spectrum generating unit configured to generate a phase spectrum, based on the plurality of the extracted pixel spectra.
Claims14
A spectrum processing device comprising:
- a data acquiring unit configured to acquire, for each of pixels expressing positions on a specimen, spectrum imaging data in which a pixel spectrum based on a signal from the specimen is stored;
- an extraction unit configured to compare, for each of the pixels, the pixel spectrum and a representative spectrum selected from the spectrum imaging data, and extract a plurality of the pixel spectra from the spectrum imaging data, based on a comparison result;
- and
- a spectrum generating unit configured to generate a phase spectrum, based on the plurality of the extracted pixel spectra.
A spectrum processing method comprising:
- acquiring, for each of pixels expressing positions on a specimen, spectrum imaging data in which a pixel spectrum based on a signal from the specimen is stored;
- comparing, for each of the pixels, the pixel spectrum and a representative spectrum selected from the spectrum imaging data, and extracting a plurality of the pixel spectra from the spectrum imaging data, based on a comparison result;
- and
- generating a phase spectrum, based on the plurality of the extracted pixel spectra.
Dependencies are inferred from the claim text.