Queue time control
AssigneeApplied Materials, Inc.
InventorChongyang Wang
Life of this patent
Estimating the term…
Abstract
A method includes determining a predetermined queue time associated with a process recipe. The predetermined queue time is associated with an amount of time a substrate is at a location prior to being moved from the location. The method further includes causing control of speed associated with one or more components of a substrate processing system based on the predetermined queue time. The control of speed is associated with transfer of the substrate.
Claims20
A method comprising:
- determining a predetermined queue time associated with a process recipe, wherein the predetermined queue time is associated with an amount of time a substrate is at a location prior to being moved from the location;
- and
- causing control of speed associated with one or more components of a substrate processing system based on the predetermined queue time, the control of speed being associated with transfer of the substrate.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to perform operations comprising:
- determining a predetermined queue time associated with a process recipe, wherein the predetermined queue time is associated with an amount of time a substrate is at a location prior to being moved from the location;
- and
- causing control of speed associated with one or more components of a substrate processing system based on the predetermined queue time, the control of speed being associated with transfer of the substrate.
A system comprising:
- memory;
- and
- a processing device coupled to the memory, the processing device to:
- determine a predetermined queue time associated with a process recipe, wherein the predetermined queue time is associated with an amount of time a substrate is at a location prior to being moved from the location;
- and
- cause control of speed associated with one or more components of a substrate processing system based on the predetermined queue time, the control of speed being associated with transfer of the substrate.
Dependencies are inferred from the claim text.