Bonding method, bonding apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorAKIFUMI KOMUKAI
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AssigneeCanon Kabushiki Kaisha
InventorAKIFUMI KOMUKAI
Estimating the term…
A bonding method of conveying a plurality of carriers and a plurality of substrates and boding a first object and a second object, the plurality of carriers each holding a plurality of first objects, the plurality of substrates each having a plurality of second objects formed thereon, the method including obtaining rank information including data indicating ranks of the respective first objects for each of the plurality of carriers and data indicating ranks of the respective second objects for each of the plurality of substrates, deciding, based on the rank information, a conveyance order of the plurality of carriers and a conveyance order of the plurality of substrates, and conveying the plurality of carriers and the plurality of substrates to the bonding apparatus in accordance with the conveyance orders decided in the deciding, and bonding the first object and the second object.
A bonding method of conveying a plurality of carriers and a plurality of substrates to a bonding apparatus and boding a first object and a second object, the plurality of carriers each holding a plurality of first objects, the plurality of substrates each having a plurality of second objects formed thereon, the method comprising:
A bonding apparatus that conveys a plurality of carriers and a plurality of substrates and bonds a first object and a second object, the plurality of carriers each holding a plurality of first objects, the plurality of substrates each having a plurality of second objects formed thereon, the apparatus comprising:
Dependencies are inferred from the claim text.