Methods of determining a mechanical property of a layer applied to a substrate, and associated devices

A computer program product comprising a non-transitory computer readable medium having instructions therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:

• obtain input data comprising metrology data relating to a layer of a substrate;
• obtain layout data relating to a layout of a pattern to be applied in the layer;
• use a first model or first model term to determine a global mechanical property related to the layer based on at least the input data;
• and
• use at least one second model or at least one second model term to predict a mechanical property distribution or associated overlay map based on the first mechanical property and the layout data, the mechanical property distribution describing the mechanical property variation over the layer.