Dry development for metal-oxide photoresists
AssigneeApplied Materials, Inc.
InventorsNASRIN KAZEM, LAKMAL CHARIDU KALUTARAGE, MADHUR SACHAN, MARK SALY, ANDREA LEONCINI, DOREEN WEI YING YONG
Life of this patent
Estimating the term…
Abstract
Embodiments disclosed herein include a method of dry developing a metal-oxide photoresist. In an embodiment, a method of patterning a metal-oxide photoresist, such as a Sn-based photoresist, includes depositing the metal-oxide photoresist over a substrate, exposing the metal-oxide photoresist with an extreme ultra-violet (EUV) exposure to form exposed regions and non-exposed regions, and developing the exposed metal-oxide photoresist using an electron-donor ligand-based dry etch process.
Claims20
A method of patterning a metal-oxide photoresist, comprising:
- depositing the metal-oxide photoresist over a substrate;
- exposing the metal-oxide photoresist with an extreme ultra-violet (EUV) exposure to form exposed regions and non-exposed regions;
- and
- developing the exposed metal-oxide photoresist using an electron-donor ligand-based dry etch process.
A method of patterning a metal-oxide photoresist, comprising:
- depositing the metal-oxide photoresist over a substrate;
- exposing the metal-oxide photoresist with an extreme ultra-violet (EUV) exposure to form exposed regions and non-exposed regions;
- treating the exposed metal-oxide photoresist with a fluorination process;
- and
- developing the exposed and fluorinated metal-oxide photoresist using an electron-donor ligand-based dry etch process.
A method of patterning a metal-oxide photoresist, comprising:
- depositing the metal-oxide photoresist over a substrate;
- exposing the metal-oxide photoresist with an extreme ultra-violet (EUV) exposure to form exposed regions and non-exposed regions;
- developing the exposed metal-oxide photoresist by cycling (1) treating the exposed metal-oxide photoresist with a fluorination process, and (2) using an electron-donor ligand-based dry etch process.
Dependencies are inferred from the claim text.