Air conditioning system, air conditioning method, and article manufacturing method

An article manufacturing method comprising:

• a step of performing pattern formation on a substrate using an imprint device installed in an air conditioning system that includes a heating element installation room in which the imprint device is installed as the heating element, a circulation air conditioning unit that adjusts a temperature of exhaust heat air collected from the heating element installation room to a predetermined temperature and returns it to the heating element installation room, an air supply unit that supplies supplied air from the outside of the circulation air conditioning unit, an air exhaust unit that discharges the exhaust heat air to the outside of the circulation air conditioning unit, an air supply or exhaust adjustment unit that adjusts an air volume of the supplied air and an air volume of the discharged air discharged from the air exhaust unit on the basis of a difference in temperature between the supplied air and the exhaust heat air;
• and
• a step of processing the substrate subjected to the pattern formation in the previous process.