F-theta objective and scanner device equipped therewith
OwnerJulian Hellstern, Timo Flaig +1inventors
InventorsJulian Hellstern, Timo Flaig, Tobias Marte
Life of this patent
Estimating the term…
Abstract
An F-theta objective has precisely three lenses. The three lenses being: a first lens with a first focal length, which is designed as a biconvex lens with a positive refractive power, a second lens with a second focal length, which is designed as a biconcave lens with a negative refractive power, and a third lens with a third focal length, which is designed as a meniscus lens with a positive refractive power. The first lens, the second lens, and the third lens are arranged one behind the other in a beam path and form a lens assembly.
Claims14
An F-theta objective, which has precisely three lenses, the three lenses being:
- a first lens with a first focal length, which is designed as a biconvex lens with a positive refractive power,
- a second lens with a second focal length, which is designed as a biconcave lens with a negative refractive power, and
- a third lens with a third focal length, which is designed as a meniscus lens with a positive refractive power,
- wherein the first lens, the second lens, and the third lens are arranged one behind the other in a beam path and form a lens assembly.
An F-Theta objective, which has precisely four lenses made of a material with a refractive index of less than 2.0, the four lenses being:
- a first lens with a first focal length, which is designed as a meniscus lens or as a biconvex lens with a positive refractive power,
- a second lens with a second focal length, which is designed as a biconcave lens with a negative refractive power,
- a third lens with a third focal length, which is designed as a meniscus lens or as a plane convex lens with a positive refractive power, and
- a fourth lens with a fourth focal length having a positive refractive power,
- wherein the first lens, the second lens, and the third lens are arranged one behind the other in a beam path and form a lens assembly, and
- wherein the fourth lens is arranged upstream of the lens assembly or downstream of the lens assembly in the beam path.
Dependencies are inferred from the claim text.