Sensor, imaging device and electronic device
AssigneeSony Semiconductor Solutions Corporation
InventorYOSHIHIRO ANDO
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Abstract
A sensor according to an embodiment of the present disclosure includes a substrate, a diaphragm including a light absorbing film disposed with a cavity interposed between the light absorbing film and the substrate, a beam portion that supports the diaphragm on the substrate, and a temperature sensing element that detects a temperature change of the light absorbing film. The light absorbing film contains a fibrous material or a sheet-like material that absorbs terahertz waves or infrared rays. The mean value of angles formed by a direction of the fibrous material or a planar direction of a sheet and a direction parallel to the substrate is 45° or less at least in a part of a region of the light absorbing film.
Claims14
A sensor comprising:
- a substrate;
- a diaphragm including a light absorbing film disposed with a cavity interposed between the light absorbing film and the substrate;
- a beam portion that supports the diaphragm on the substrate;
- and
- a temperature sensing element that detects a temperature change of the light absorbing film,
- wherein the light absorbing film contains a fibrous material or a sheet-like material that absorbs terahertz waves or infrared rays, and
- the mean value of angles formed by a direction of the fibrous material or a planar direction of a sheet and a direction parallel to the substrate is 45° or less at least in a part of a region of the light absorbing film.
A sensor comprising:
- a substrate;
- a diaphragm including a light absorbing film disposed with a cavity interposed between the light absorbing film and the substrate;
- a beam portion that supports the diaphragm on the substrate;
- and
- a temperature sensing element that detects a temperature change of the light absorbing film,
- wherein the light absorbing film contains a material that absorbs terahertz waves or infrared rays, and
- thermal conductivity in a direction parallel to the substrate is higher than thermal conductivity in a direction perpendicular to the substrate at least in a part of a region of the light absorbing film.
A sensor comprising:
- a substrate;
- a diaphragm including a light absorbing film disposed with a cavity interposed between the light absorbing film and the substrate;
- a beam portion that supports the diaphragm on the substrate;
- and
- a temperature sensing element that detects a temperature change of the light absorbing film,
- wherein the light absorbing film contains a material that absorbs terahertz waves or infrared rays, and
- the light absorbing film has an opening, the opening having a diameter set at a half or less of a wavelength of light to be detected.
Dependencies are inferred from the claim text.