Cover for mems-based cooling systems

A heat transfer system, comprising:

• a plurality of fluid transfer cells which vibrationally move a fluid, the plurality of fluid transfer cells including at least one outer wall and at least one inner wall, the at least one outer wall having at least one outer inlet port for each of the plurality of fluid transfer cells, the at least one inner wall having at least one inner inlet port for each of the plurality of fluid transfer cells;
• and a membrane adjacent to each of the at least one outer inlet port, a flow chamber being between the membrane and each of the at least one inner inlet port;
• wherein each of the plurality of fluid transfer cells includes a chamber and an actuator in the chamber, the chamber including the at least one inner inlet port and a plurality of orifices, the actuator being configured to vibrate in a first vibrational mode to draw fluid into the chamber through the inner inlet port, direct the fluid from a first side of the actuator proximate to the inner inlet port to a second side of the actuator proximate to the plurality of orifices, and through the plurality of orifices.

A method system, comprising:

• driving an actuator in each of a plurality of fluid transfer cells to vibrate in a first vibrational mode, the plurality of fluid transfer cells including at least one outer wall and at least one inner wall, the at least one outer wall having at least one outer inlet port for each of the plurality of fluid transfer cells, the at least one inner wall having at least one inner inlet port for each of the plurality of fluid transfer cells, a membrane being adjacent to each of the at least one outer inlet port, a flow chamber being between the membrane and each of the at least one inner inlet port, each of the plurality of fluid transfer cells including a chamber and the actuator in the chamber, the chamber including the at least one inner inlet port and a plurality of orifices;
• wherein the actuator vibrating in the first vibrational mode draws fluid into the chamber through the inner inlet port, directs the fluid from a first side of the actuator proximate to the inner inlet port to a second side of the actuator proximate to the plurality of orifices, and through the plurality of orifices.